PLASMA PARAMETERS AND KINETICS OF ACTIVE SPECIES IN HBr + Cl2 + O2 GAS MIXTURE
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منابع مشابه
Abrupt transitions in species number densities and plasma parameters in a CH3F/O2 inductively coupled plasma
Measured relative densities as a function of O2 addition in a CH3F/O2 inductively coupled plasma changed abruptly for H, O, and particularly F atoms (factor of 4) at 48% O2. A corresponding transition was observed in electron density, effective electron temperature, and gas temperature, as well as in C, CF, and CH optical emission. These abrupt transitions were attributed to the reactor wall re...
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ژورنال
عنوان ژورنال: IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII KHIMIYA KHIMICHESKAYA TEKHNOLOGIYA
سال: 2019
ISSN: 2500-3070,0579-2991
DOI: 10.6060/ivkkt.20196207.5947